High precision optical metrology may be viewed from the perspective of the relevant object properties for optical
measurement such as microstructure, surface gradient and geometrical complexity. We discuss high precision
measurement methods and compare their suitability with respect to these object properties. We emphasize reflectometry
and shearography as examples of two interesting techniques particularly suited for high precision optical metrology and
extend the discussion to optical non destructive testing (NDT). In this context, reflectometry and shearography appear to
be interesting techniques suitable for both optical metrology and NDT. We finally discuss the unique features of laser
ultrasonic for NDT.
The quality control of highly reflective surfaces requires a measurement method which is able to resolve the surface
shape in the nanometer range. Different methods have been developed in the past, e.g. based on interferometry or by
tactile coordinate measurement machines. However, most of them do not match the industrial need for a fast method
which is insensitive to environmental disturbance.
The newly developed method using the reflection of fringe pattern by the surface under test, and therefore called "Fringe
Reflection Technique (FRT)", overcomes the difficulties of known measurement methods. In this method a pattern of
straight fringes is generated by a monitor. The mirrored pattern is observed by a camera via the object surface under test.
Any deviation of the surface against the ideal, i.e. the mathematically accurate surface will yield a distortion of the
pattern. This distortion is analyzed by an image processing system, called the Fringe Processor. The surface topology is
delivered by local surface gradients which can be integrated to object shape or differentiated to local curvature. The
resolution of the system can be adapted to the measurement requirements in a wide range from micrometer down to subnanometer.
Anyhow, the system is stable against environmental disturbances. It works without vibration isolation in
rooms without any climate control. It is possible to measure freeform surfaces with no constraints on object geometry.
The measurement of a silicon mirror surface produced by diamond turning in a high precision tool machine serves as one
example. The surface shape could be determined with a resolution below one nanometer. The measurements match the
results of an interferometer and are better in certain areas.
The wide scale inspection of extended technical components with respect to the recognition of typical surface features (shape, texture, roughness) needs the combined application of different measurement techniques with new tools for the consistent analysis and description of the measuring results. The new concept of scaleable topometry meets the demands of wide scale surface topometry. Controlled by the evaluation of scale-independent surface features based on fractal geometry, different measurement techniques with subsequent lateral and depth resolution are applied to the surface. The result is a complete description of the surface covering a wide scale taking into account special regions of interest. The choice and orientation of the special measurement technique is supported by a new feature extraction method called the fractal pyramid. The advantages of the new concept are demonstrated on several technical components.
Modern production processes are directed by properties of the components to be manufactured. These components have different sizes, functionalities, high assembly complexity and high security requirements. The increasing requirements during the manufacturing of complex products like cars and aircrafts demand new solutions for the quality assurance - especially for the production at different places. The main focus is to find a measurement strategy that is cost effective, flexible and adaptive. That means a clear definition of the measurement problem, the measurement with adapted resolution, the data preparation and evaluation and support during measurement and utilisation of the results directly in the production.
In this paper we describe flexible measurement devices on example of three different techniques: fringe projection, fringe reflection and shearography. These techniques allow the detection of surface and subsurface defects like bumps, dents and delaminations with high resolution. The defects can be optically mapped onto the object's surface. Results are demonstrated with big components taken from automotive and aircraft production. We will point out the most important adaptations of the systems to realize miniaturized, robust and mobile devices for the quality assurance in an industrial environment. Additionally the implementation into a Mobile Maintenance and Control structure is demonstrated.
Reliable real-time surface inspection of extended surfaces with high resolution is needed in several industrial applications. With respect to an efficient application to extended technical components such as aircraft or automotive parts, the inspection system has to perform a robust measurement with a ratio between depth resolution and lateral extension of less than 10–6. This ratio is at least 1 order beyond the solutions that are offered by existing technologies. The concept of scaled topometry consists of a systematic combination of different optical measurement techniques with overlapping ranges of resolution systematically to receive characteristic surface information with the required accuracy. In such a surface inspection system, an active algorithm combines measurements on several scales of resolution and distinguishes between local fault-indicating structures with different extensions and global geometric properties. The first part of this active algorithm finds indications of critical surface areas in the data of every measurement and separates them into different categories. The second part analyzes the detected structures in the data with respect to their resolution, and decides whether a further local measurement with a higher resolution has to be performed. The third part positions the sensors and starts the refined measurements. The fourth part finally integrates the measured local dataset into the overall data mesh. We have constructed a laboratory setup capable of measuring surfaces with extensions up to 1500×1000×500 mm3 (in x, y, and z directions, respectively). Using this measurement system we are able to separate the fault-indicating structures on the surface from the global shape, and to classify the detected structures according to their extensions and characteristic shapes simultaneously. The level of fault-detection probability is applicable by input parameter control.
Many optical metrology methods deliver 2D fields of gradients, such as shearography, Shack-Hartmann sensors and the fringe reflection technique that produce gradients for deformation, wave-front shape and object shape, respectively. The evaluation for gradient data usually includes data processing, feature extraction and data visualization. The matters of this talk are optimized and robust processing methods to handle and prepare the measured gradients. Special attention was directed to the fact that optical measurements typically produce data far from ideal behavior and that parts of the measured area are usually absent or invalid. A robust evaluation must be capable to deliver reliable results with non perfect data and the evaluation speed should be sufficient high for industrial applications. Possible data analysis methods for gradients are differentiation and further integration as well as vector processing when orthogonal gradients are measured. Evaluation techniques were investigated and optimized (e.g. for effective bump and dent analysis). Key point of the talk will be the optimized data integration that delivers the potential of measured gradients. I.e. for the above mentioned examples: the deformation, wave-front and object shape are delivered by successful data integration. Local and global existing integration methods have been compared and the optimum techniques were combined and improved for an accelerated and robust integration technique that is able to deal with complicated data validity masks and noisy data with remaining vector rotation which normally defeats a successful integration. The evaluation techniques are compared, optimized and results are shown for data from shearography and the fringe reflection technique (, which is demonstrated in talk “High Resolution 3D Shape Measurement on Specular Surfaces by Fringe Reflection”).
Accurate 3D shape measurement is of big importance for industrial inspection. Because of the robustness, accuracy and ease of use optical measurement techniques are gaining importance in industry. For fast 3D measurements on big surfaces fringe projection is commonly used: A projector projects fringes onto the object under investigation and the scattered light is recorded by a camera from a triangulation angle. Thus, it is possible reaching a depth resolution of about one by 10.000 of the measurement field size (e.g. 100 μm for a 1 m sized field). For non- or low scattering objects it is common to put scattering material like particle spray onto the object under investigation. Objects where this is not allowed are often regarded as problematic objects for full field non-coherent optical measurement techniques. The solution is to switch from fringe projection to fringe reflection. The fringe reflection technique needs a simple setup to evaluate a fringe pattern that is reflected from the surface under investigation. Like for fringe projection the evaluated absolute phase identifies the location of the originating fringe. This allows identifying the reflection angles on the object for every camera pixel. The results are high resolution local gradients on the object which can be integrated to get the 3D shape. The achievable depth resolution compared to fringe projection is much better and reaches to a depth resolution down to 1 nm for smooth surfaces. We have proven the ability, robustness and accuracy of the technique for various technical objects and also fluids. A parallel paper of this conference 'Evaluation Methods for Gradient Measurement Techniques' picks up further processing of the evaluated data and explains in more detail the performed calculations. This paper mainly concentrates on the fringe reflection principle, reachable resolution and possible applications.
Fast and robust 3D quality control as well as fast deformation measurement is of particular importance for industrial inspection. Additionally a direct response about measured properties is desired. Therefore, robust optical techniques are needed which use as few images as possible for measurement and visualize results in an efficient way. One promising technique for this aim is the inverse pattern projection which has the following advantages:
The technique codes the information of a preceding measurement into the projected inverse pattern. Thus, it is possible to do differential measurements using only one camera frame for each state. Additionally, the results are optimized straight fringes for sampling which are independent of the object curvature. The hardware needs are low as just a programmable projector and a standard camera are necessary.
The basic idea of inverse pattern projection, necessary algorithms and found optimizations are demonstrated, roughly. Evaluation techniques were found to preserve a high quality phase measurement under imperfect conditions.
The different application fields can be sorted out by the type of pattern used for inverse projection. We select two main topics for presentation. One is the incremental (one image per state) deformation measurement which is a promising technique for high speed deformation measurements. A video series of a wavering flag with projected inverse pattern was evaluated to show the complete deformation series.
The other application is the optical feature marking (augmented reality) that allows to map any measured result directly onto the object under investigation. Any properties can be visualized directly on the object’s surface which makes inspections easier than with use of a separated indicating device. The general ability to straighten any kind of information on 3D surfaces is shown while preserving an exact mapping of camera image and object parts. In many cases this supersedes an additional monitor to view results and allows an operator to investigate results on the object, directly.
Industrial- and multimedia applications need cost effective, compact and flexible 3D profiling instruments. In the talk we will show the principle of, applications for and results from a new miniaturized 3-D profiling system for macroscopic scenes. The system uses a compact housing and is usable like a camera with minimum stabilization like a tripod.
The system is based on common fringe projection technique. Camera and projector are assembled with parallel optical axes having coplanar projection and imaging plane. Their axes distance is comparable to the human eyes distance altogether giving a complete system of 21x20x11 cm size and allowing to measure high gradient objects like the interior of tubes. The fringe projector uses a LCD which enables fast and flexible pattern projection. Camera and projector have a short focal length and a high system aperture as well as a large depth of focus. Thus, objects can be measured from a shorter distance compared to common systems (e.g. 1 m sized objects in 80 cm distance). Actually, objects with diameters up to 4 m can be profiled because the set-up allows working with completely opened aperture combined with bright lamps giving a big amount of available light and a high Signal to Noise Ratio.
Normally a small basis has the disadvantage of reduced sensitivity. We investigated in methods to compensate the reduced sensitivity via setup and enhanced evaluation methods. For measurement we use synthetic wavelengths. The developed algorithms are completely adaptable concerning the users needs of speed and accuracy. The 3D camera is built from low cost components, robust, nearly handheld and delivers insights also into difficult technical objects like tubes and inside volumes.
Besides the realized high resolution phase measurement the system calibration is an important task for usability. While calibrating with common photogrammetric models (which are typically used for actual fringe projection systems) problems were found that originate from the short focal length and the extreme opening angle of the system as well as the large depth of focus. The actual calibration method is outlined and current problems are shown. An improved calibration of the system is discussed for improved results in future.
Fast and robust 3D quality control as well as fast deformation measurement is of particular importance for industrial inspection. Additionally a direct response about measured properties is desired. Therefore, robust optical techniques are needed which use as few images as possible for measurement and visualize results in an efficient way. One promising technique for this aim is the inverse pattern projection which has the following advantages:
The technique codes the information of a preceding measurement into the projected inverse pattern. Thus, it is possible to do differential measurements using only one camera frame for each state. Additionally, the results are optimized straight fringes for sampling which are independent of the object curvature. The ability to use any image for inverse projection enables the use for augmented reality, i.e. any properties can be visualized directly on the object's surface which makes inspections easier than with use of a separated indicating device. The hardware needs are low as just a programmable projector and a standard camera are necessary.
The basic idea of inverse pattern projection, necessary algorithms ane found optimizations are demonstrated, roughly. Evaluation techniques were found to preserve a high quality phase measurement under imperfect conditions.
The different application fields can be sorted out by the type of pattern used for inverse projection. We select two main topics for presentation. One is the incremental (one image per state) deformation measurement which is a promising technique for high speed deformation measurements. A video series of a wavering flag with projected inverse pattern was evaluated to show the complete deformation series.
The other application is the optical feature marking (augmented reality) that allows to map any measured result directly onto the object under investigation. The general ability to straighten any kind of information on 3D surfaces is shown while preserving an exact mapping of camera image and object parts. In many cases this supersedes an additional monitor to view results and allows an operator to investigate results on the object, directly.
KEYWORDS: Inspection, Sensors, Tolerancing, Fractal analysis, Wavelets, Data integration, Detection and tracking algorithms, Optical testing, Assembly tolerances, Process control
Reliable real-time surface inspection of extended surfaces with high resolution is needed in several industrial applications. With respect to an efficient application to extended technical components such as aircraft or automotive parts, the inspection system has to perform a robust measurement with a ratio of less then 10-6 between depth resolution and lateral extension. This ratio is at least one order beyond the solutions that are offered by existing technologies. The concept of scaled topometry consists of arranging different optical measurement techniques with overlapping ranges of resolution systematically in order to receive characteristic surface information with the required accuracy. In such a surface inspection system, an active algorithm combines measurements on several scales of resolution and distinguishes between local fault indicating structures with different extensions and global geometric properties. The first part of this active algorithm finds indications of critical surface areas in the data of every measurement and separates them into different categories. The second part analyses the detected structures in the data with respect to their resolution and decides whether a further local measurement with a higher resolution has to be performed. The third part positions the sensors and starts the refined measurements. The fourth part finally integrates the measured local data set into the overall data mesh. We have constructed a laboratory setup capable of measuring surfaces with extensions up to 1500mm x 1000mm x 500mm (in x-, y- and z-direction respectively). Using this measurement system we will be able to separate the fault indicating structures on the surface from the global shape and to classify the detected structures according to their extensions and characteristic shapes simultaneously. The level of fault detection probability will be applicable by input parameter control.
We report on the development of a versatile and portable optical profilometer and show its applicability for quick and accurate digitization of 3-D objects. The profilometer is an advanced fringe-projection system that uses a calibrated LCD matrix for fringe-pattern generation, a hierarchical sequence of fringe patterns to demodulate the measured phase, and a photogrammetric calibration technique to obtain accurate 3-D data in the measurement volume. The setup in itself is mechanically stable and allows for a measurement volume of about 1x1x0.5 m3. We discuss the calibration of the sensor and demonstrate the process of recording phase data for several sub-views, generating 3-D point clouds from them, and synthesizing the CAD representation of an entire 3-D object by merging the data sets.
A new, miniaturized fringe projection system is presented which has a size and handling that approximates to common 2D cameras. The system is based on the fringe projection technique. A miniaturized fringe projector and camera are assembled into a housing of 21x20x11 cm size with a triangulation basis of 10 cm. The advantage of the small triangulation basis is the possibility to measure difficult objects with high gradients. Normally a small basis has the disadvantage of reduced sensitivity. We investigated in methods to compensate the reduced sensitivity via setup and enhanced evaluation methods. Special hardware issues are a high quality, bright light source (and components to handle the high luminous flux) as well as adapted optics to gain a large aperture angle and a focus scan unit to increase the usable measurement volume. Adaptable synthetic wavelengths and integration times were used to increase the measurement quality and allow robust measurements that are adaptable to the desired speed and accuracy. Algorithms were developed to generate automatic focus positions to completely cover extended measurement volumes. Principles, setup, measurement examples and applications are shown.
We are currently introducing a new scanning triangulation method for absolute 3D profiling of a macroscopic scene based on fringe projection technique. A scanning focal plane allows the phase to be determined for any desired depth range of the measurement volume. Furthermore, the limitations of the depth of focus occurring by projected light techniques will be overcome, allowing a large aperture and therefore better use of light. Two different systems based on this technique will be shown: System I uses both vertical and lateral translation of a Ronchi grating. System II uses an LCD element for generation of different fringes which has to be translated vertically, only. The basic principle of the new method is explained. First measurement results of both systems demonstrate the efficiency of the newly developed algorithms and the innovative measurement arrangements.
The idea of scaled topometry is to organize systematically different optical measurement techniques with overlapping ranges of resolution in order to receive highly resolved surface information in a wide range of scales. In such a surface inspection system, measurements on different scales of resolution have to be combined by a discrimination algorithm which should be sensitive on faults independent on the scale of resolution. Starting from a global measurement with low resolution certain critical areas have to be detected in which a refined measurements has to be performed. This process of detection and refinement has to be repeated on different scales. The task of the discrimination algorithm should be the detection of critical structures and the determination of the necessary order of refinement in the resolution. For the reason of scale- independence a classical approach using the surface roughness is not suitable.
Two remote and nondestructive testing techniques for the study of the decay mechanism of stone and plaster surfaces are presented. While electronic speckle pattern interferometer (ESPI) measures the 3-D-microdeformations of the surface, transient thermography shows at the same time invisible defects and structural faults as a reaction to the impact of short heat pulses. The combination of these two different techniques demonstrates its feasibility to detect restorative work and shows the compatibility of classical and modern substitutes and restoration techniques to historical materials.
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