Dr. Toshihiko Onozuka Profile

Dr. Toshihiko Onozuka

at Hitachi Ltd

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Author

Publications (3)

Proceedings Article | 24 March 2006 Paper

Estimation of pattern shape based on CD-SEM image by using MPPC method

T. Onozuka, Y. Ojima, J. Meessen, B. Rijpers

Proceedings Volume 6152, 61521D (2006) https://doi.org/10.1117/12.655987

KEYWORDS: Critical dimension metrology, Scanning transmission electron microscopy, Line edge roughness, Edge roughness, Scanning electron microscopy, Electron microscopes, Cadmium, Atomic force microscopy, Etching, Line width roughness

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Proceedings Article | 29 June 1998 Paper

Optimization of exposure procedures for sub-quarter-micron CMOS applications

Shoji Hotta, Toshihiko Onozuka, Keiko Fukumoto, Seiichiro Shirai, Shinji Okazaki

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310790

KEYWORDS: Critical dimension metrology, Binary data, Phase shifts, Halftones, Photomasks, Photoresist processing, Optical lithography, Logic devices, Semiconducting wafers, Materials processing

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Proceedings Article | 16 May 1994 Paper

Negative resists for i-line lithography utilizing acid-catalyzed intramolecular dehydration reaction

Takumi Ueno, Shou-ichi Uchino, Keiko Hattori, Toshihiko Onozuka, Seiichiro Shirai, Noboru Moriuchi, Michiaki Hashimoto, S. Koibuchi

Proceedings Volume 2195, (1994) https://doi.org/10.1117/12.175334

KEYWORDS: Lithography, Chlorine, Photomasks, Absorption, Infrared spectroscopy, Phase shifting, Spectroscopy, Absorbance, Hydrogen, Analytical research

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