Mr. Tsuyoshi Kajiyashiki Profile

Tsuyoshi Kajiyashiki

Project Manager at Kuraray Co Ltd

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Publications (2)

Proceedings Article | 1 April 2009 Paper

Evaluation of novel resist materials for EUV lithography

Ichihiro Aratani, Shuji Matsunaga, Tsuyoshi Kajiyashiki, Takeo Watanabe, Hiroo Kinoshita

Proceedings Volume 7273, 72731Z (2009) https://doi.org/10.1117/12.813586

KEYWORDS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Chemical species, Absorption, Oxygen, Sulfur, Semiconducting wafers, Carbon, Hydrogen

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Proceedings Article | 15 April 2008 Paper

Synthesis and evaluation of novel resist monomers and copolymers for ArF lithography: Part II

Osamu Nakayama, Takashi Fukumoto, Miki Tachibana, Junko Sato, Masahiko Kitayama, Tsuyoshi Kajiyashiki

Proceedings Volume 6923, 69233F (2008) https://doi.org/10.1117/12.771130

KEYWORDS: Polymers, Lithography, Chemical species, Spectroscopy, Quartz, Crystals, Polymerization, Chemical analysis, Oscillators, Oxygen

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