CONFERENCE PROCEEDINGS
Advanced Search
Victoria M. Chaplick
at UVTech Systems Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 March 2010 Paper
Analysis of photoresist edge bead removal using laser light and gas
V. Chaplick, E. Degenkolb, D. Elliott, K. Harte, R. Millman, M. Tardif
Proceedings Volume 7640, 76403J (2010) https://doi.org/10.1117/12.853444
KEYWORDS: Semiconducting wafers, Gas lasers, Photoresist materials, Particles, Silicon, Semiconductor lasers, Coating, Manufacturing, Yield improvement, Pulsed laser operation
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top