Dr. Vivian Peng-We Chuang Profile

Dr. Vivian Peng-We Chuang

at JSR Micro Inc

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Author

Publications (3)

Proceedings Article | 20 March 2015 Paper

Development of spin-on metal hardmask (SOMHM) for advanced node

Shintaro Yamada, Deyan Wang, Vivian Chuang, Cong Liu, Sabrina Wong, Michael Clark, Charlotte Cutler, William Williams, Paul Baranowski, Mingqi Li, Joe Mattia, JoAnne Leonard, Peter Trefonas, Kathleen O’Connell, Cheng bai Xu

Proceedings Volume 9425, 94251X (2015) https://doi.org/10.1117/12.2086005

KEYWORDS: Metals, Etching, Reflectivity, Dry etching, Photoresist materials, Polymers, Chemical vapor deposition, Oxygen, Photomasks, Silicon

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Proceedings Article | 21 March 2012 Paper

Designing new materials and processes for directed self-assembly applications

Shih-Wei Chang, Erin Vogel, Valeriy Ginzburg, Daniel Murray, John Kramer, Jeffrey Weinhold, Vivian P. Chuang, Rahul Sharma, Jessica Evans, Brian Landes, Shouren Ge, Peter Trefonas, Phillip Hustad

Proceedings Volume 8323, 83231M (2012) https://doi.org/10.1117/12.916429

KEYWORDS: Annealing, Etching, Thin films, Scanning electron microscopy, Optical lithography, Materials processing, Reactive ion etching, Directed self assembly, Transistors, Silicon

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Proceedings Article | 30 March 2010 Paper

Templated self-assembly of Si-containing block copolymers for nanoscale device fabrication

C. Ross, Y. Jung, V. Chuang, J. Son, K. Gotrik, R. Mickiewicz, J. K. Yang, J. Chang, K. Berggren, J. Gwyther, I. Manners

Proceedings Volume 7637, 76370H (2010) https://doi.org/10.1117/12.848502

KEYWORDS: Optical spheres, Lithography, Etching, Nanolithography, Metals, Polymers, Oxygen, Plasma, Picosecond phenomena, Annealing

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