Dr. Vladimir Popov Profile

Dr. Vladimir Popov

at ISP SB RAS

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 28 May 2004 Paper

FET on ultrathin SOI (fabrication and research)

Olga Naumova, Irina Antonova, Vladimir Popov, Yury Nastaushev, Tatiana Gavrilova, Marina Kachanova, Litvin Litvin, Alexander Aseev

Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.558394

KEYWORDS: Silicon, Field effect transistors, Plasma etching, Transistors, Etching, Information operations, Annealing, Interfaces, Oxides, Oxidation

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Proceedings Article | 28 May 2004 Paper

Gamma radiation tolerance of 0.5-µm SOI MOSFETs

Olga Naumova, A. Frantsuzov, Vladimir Popov

Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.558405

KEYWORDS: Field effect transistors, Oxides, Transistors, Tolerancing, Gamma radiation, Semiconducting wafers, Interfaces, Radiation effects, Silicon, Nickel

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Proceedings Article | 29 July 2002 Paper

Nanotechnologies in semiconductor electronics

Oleg Pchelyakov, Aleksandr Toropov, Vladimir Popov, A. Latyshev, L. Litvin, Yury Nastaushev, Alexander Aseev

Proceedings Volume 4900, (2002) https://doi.org/10.1117/12.484564

KEYWORDS: Silicon, Nanolithography, Transistors, Oxides, Semiconductors, Gallium arsenide, Nanostructures, Semiconducting wafers, Interfaces, Oxidation

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Proceedings Article | 10 August 2001 Paper

Effect of stress on defect transformation in hydrogen-implanted silicon and SOI structures

Irina Antonova, Vladimir Popov, Jadwiga Bak-Misiuk, J. Domagala, Andrzej Misiuk, V. Obodnikov, A. Gutakovskii, A. Romano-Rodriguez

Proceedings Volume 4412, (2001) https://doi.org/10.1117/12.435812

KEYWORDS: Silicon, Hydrogen, Crystals, Annealing, Argon, Diffraction, Ions, Interfaces, Laser crystals, Reflection

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Conference Committee Involvement (1)

The International Conference on Micro- and Nano-Electronics 2018

1 October 2018 | Zvenigorod, Russian Federation

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