The white-light scanning interferometer (WLSI) and confocal microscope (CM) are the two major optical inspection
systems for measuring three-dimensional (3D) surface profile (SP) of micro specimens. Nevertheless, in practical
applications, WLSI is more suitable for measuring smooth and low-slope surfaces. On the other hand, CM is more suitable
for measuring uneven-reflective and low-reflective surfaces. As for aspect of surface profiles to be measured, the
characteristics of WLSI and CM are also different. WLSI is generally used in semiconductor industry while CM is more
popular in printed circuit board industry. In this paper, a self-assembled multi-function optical system was integrated to
perform Linnik white-light scanning interferometer (Linnik WLSI) and CM. A connecting part composed of tubes, lenses
and interferometer was used to conjunct finite and infinite optical systems for Linnik WLSI and CM in the self-assembled
optical system. By adopting the flexibility of tubes and lenses, switching to perform two different optical measurements
can be easily achieved. Furthermore, based on the shape from focus method with energy of Laplacian filter, the CM was
developed to enhance the on focal information of each pixel so that the CM can provide all-in-focus image for performing
the 3D SP measurement and analysis simultaneously. As for Linnik WLSI, eleven-step phase shifting algorithm was used
to analyze vertical scanning signals and determine the 3D SP.
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