Traditional potassium dideuterium phosphate (DKDP) polishing techniques, such as single-point diamond flycutting (SPDF), magnetorheological polishing (MRF), and ion beam computation (IBF), are prone to edge collapse, subsurface damage, and small removal rates. In the study, the mechanism of crystal deliquescence is investigated based on the nature of DKDP crystal that are susceptible to deliquescence, and a method of water dissolution ultra-precision continuous polishing of DKDP crystal is proposed, with the corresponding water-in-oil solution configured as a polishing solution. The polishing solution proposed in the paper includes nonylphenol polyoxyethylene ether as a surfactant, glycerol monooleate as an oil phase, n-octanol as a cosurfactant, and pure water as an aqueous phase. The water nucleus in the polishing solution is squeezed, rubbed, and then deformed and ruptured by the action of the polishing pad and the rough peaks on the surface of the DKDP crystal, and the water molecules inside the ruptured water nucleus flow out and dissolve the surface of the crystal, resulting in the polishing of the DKDP crystal. The experimental results show that the water dissolution ultra-precision continuous polishing method can well alleviate the problems of subsurface damage and small removal rate of DKDP crystal brought by the conventional processing. DKDP crystal have surface roughness (Ra) of less than 12 nm and face shape accuracy (RMS) of less than 15 nm.
The deformation of the φ600mm reference mirror under gravity cannot be ignored when measuring optical components with a φ600mm interferometer. Therefore, it is necessary to choose a reasonable support and rotation mechanism to adjust the reference mirror of the interferometer in order to meet the accuracy requirements. In this paper, two mechanical structures for supporting and rotating the φ600mm reference mirror are analyzed. One is using the roller slings to provide tension, and the conveyor belt drives the reference mirror to rotate by friction; while the other one is using glue to connect the silica gel and the edge of the reference mirror where silica gel is fixed on the metal frame. The rotation of the reference mirror can be realized by manually rotating the frame. In order to analyze the influence of the two mechanisms on the mirror under working conditions, a three-dimensional model of the φ600mm reference mirror with its supporting system was established using the finite element analysis software ABAQUS, and the contact conditions and boundary conditions were reasonably applied to the reference mirror. Reference mirror is analyzed in both statical and dynamical states. The changes of internal stress and surface shape are compared when the reference mirror is supported and rotated on both mechanisms. The advantages of different mechanisms are elaborated, and the parameters of mechanisms are optimized theoretically. Analysis results can provide a useful guide for the support of the reference mirror and the adjustment of the φ600mm large aperture interferometer.
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