In this study, an integrated optical beam-forming network (OBFN) with multiple channel optical true time delay lines (OTTDLs) based on silicon-on-insulator (SOI) platform is designed and fabricated. The optical carriers in C-band are with a frequency space of 100 GHz and designed to meet the ITU standard. 1×32 arrayed waveguide grating (AWG) is applied to achieve dense wavelength division multiplexing(DWDM). The OTTDLs are single-mode strip waveguide for TE mode. The nominal delay step between the OTTDLs is 21 ps. To achieve a compact footprint and low loss photonics circuit, spiral routing strategy and Euler bendings are employed. The insertion loss of such waveguide is estimated to be 1.5 dB/cm. A Mach-Zehnder interferometer (MZI) based variable optical attenuator (VOA) array is designed in order to adjust the uniformity of optical power in each OTTDL, which can employ an attenuation of more than 30 dB. Due to the wavelength dependent loss of the grating coupler, AWG, and prapagation loss difference of OTTDLs, the output spectrum shows that the optical power fluctuation is less than ±2 dB before VOA tuning. The group delay is examined by a microwave transmission response measurement in the frequency range of 6∼18 GHz, which is derived from the frequency derivative of the phase. The average delay step of 21.3 ps is achieved, and no significant fluctuation of group delay among such frequency range. It denotes the broadband feature of OBFN, which is promising for application in microwave photonics (MWP) radar and other related scenarios.
The optical beamforming network (OBFN) is a promising alternative of traditional electronic phase shifter due to the advantage of eliminating the so-called beam squint behavior. Herein, a series of optical true time delay lines (OTTDLs) based on silicon on insulator (SOI) platform are proposed to produce OBFNs with multi-beam steering characteristics. A series of OBFN chips is designed to realize 34 specific delay steps between -21~+21 ps in order to achieve a nominal equal difference beam steering angle between ±45°. To pursue good beam quality, 32 delay waveguide channels are proposed according to the number of array elements. The optical carriers in each channel are densely multiplexed off-chip with a frequency difference of 100 GHz in C-band, and coupled on-chip by a grating coupler. Variable optical attenuators (VOAs) based on Mach-Zehnder interferometer (MZI) structure are introduced to tune the optical outputs of the 32 channels with a discrepancy less than ±1 dB. The OTTDLs are compatible with CMOS process, and appeared in a compact footprint of only 0.163 mm2 for a maximum true time delay of 651 ps. Such a compact waveguide layout leads to the footprint of a single chip within 2.5 mm×7.5 mm. Meanwhile, the operating temperature is under closed-loop control via a pair of thermoelectric cooler (TEC) and negative temperature coefficient thermistor (NTC). Together with hermetic package, the reliability of the OBFN chips can also be promoted.
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