Prof. Wenwu Wang Profile

Prof. Wenwu Wang

at Institute of Microelectronics of the CAS

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Study of selective dry etching Si0.7Ge0.3 with different plasma source in process of gate-all-around FET

Enxu Liu, Chaoran Yang, Junjie Li, Na Zhou, Longrui Xia, Rui Chen, Hua Shao, Jianfeng Gao, Zhenzhen Kong, Chenchen Zhang, Panpan Lai, Tao Yang, Yayi Wei, Junfeng Li, Jun Luo, Wenwu Wang

Proceedings Volume 12958, 129580F (2024) https://doi.org/10.1117/12.3010332

KEYWORDS: Etching, Plasma, Silicon, Dry etching, Field effect transistors, Gallium arsenide, Transistors, Particles, Resistance, Reflection

Read Abstract +

Proceedings Article | 16 October 2023 Paper

High performance waveguide integrated vertical silicon-based germanium avalanche photodetectors

Linkai Yi, Daoqun Liu, Peng Zhang, Bo Tang, Bin Li, Yan Yang, Wenwu Wang, Zhihua Li

Proceedings Volume 12792, 127920N (2023) https://doi.org/10.1117/12.2689606

KEYWORDS: Avalanche photodetectors, Silicon, Germanium, Dark current, Waveguides, Photocurrent, Semiconducting wafers, Optical interconnects, Eye, Electric fields

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years