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Xiaotao Shan
at Chang'an Univ.
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Publications (1)
Proceedings Article | 19 November 2019 Paper
A SOI waveguide grating coupler enhanced by additional silicon nitride layer
Xiaotao Shan, Zan Zhang, Beiju Huang, Zanyun Zhang, Chuantong Cheng, Bing Bai, Tianxi Gao, Xiaobo Xu, Hongda Chen
Proceedings Volume 11184, 1118412 (2019) https://doi.org/10.1117/12.2537198
KEYWORDS: Silicon, Optical design, Interfaces, Waveguides, Photonic integrated circuits, Packaging, Diffraction gratings, Tolerancing, Genetic algorithms, Optical fabrication equipment
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