Mr. Xinghui Li Profile

Xinghui Li

at Tohoku Univ

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 17 July 2015 Paper

Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao

Proceedings Volume 9524, 952404 (2015) https://doi.org/10.1117/12.2184829

KEYWORDS: Mirrors, Diffraction gratings, Interferometers, Lithography, Computer programming, Diffraction, Adaptive optics, Fringe analysis, Light sources, Optical fabrication

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SPIE Journal Paper | 12 May 2014

Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder

Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao

OE, Vol. 53, Issue 12, 122405, (May 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.12.122405

KEYWORDS: Computer programming, Motion measurement, Optical sensors, Sensors, Ferroelectric materials, Head, Laser beam diagnostics, Diffraction gratings, Interferometers, Prototyping

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Proceedings Article | 22 June 2013 Paper

Surface form metrology of micro-optics

Bin Xu, Zhigang Jia, Xinghui Li, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Proceedings Volume 8769, 876902 (2013) https://doi.org/10.1117/12.2019243

KEYWORDS: Micro optics, Optical scanning systems, Profiling, Lenses, Metrology, Microscopes, Computer programming, Atomic force microscopy, Diffraction, Diffraction gratings

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Proceedings Article | 31 January 2013 Paper

Fabrication of diffraction gratings for surface encoders by using a Lloyd’s mirror interferometer with a 405 nm laser diode

Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng

Proceedings Volume 8759, 87594Q (2013) https://doi.org/10.1117/12.2014467

KEYWORDS: Semiconductor lasers, Diffraction gratings, Mirrors, Computer programming, Interferometers, Photoresist materials, Lithography, Atomic force microscopy, Light sources, Diffraction

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