Mr. XiongFeng Zou Profile

XiongFeng Zou

at Univ. of Chinese Academy of Sciences

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 26 March 2019 Paper

A diffraction-based overlay model based on FDTD method

Buqing Xu, Ling Ma, Xiongfeng Zou, Lisong Dong, Yayi Wei

Proceedings Volume 10959, 109592X (2019) https://doi.org/10.1117/12.2514654

KEYWORDS: Overlay metrology, Finite-difference time-domain method, Diffraction, Metrology, Diffraction gratings, Reflection, Signal detection, Microelectronics

Read Abstract +

As well known that, the critical dimension continues to shrink and the overlay control appears to become much more challenging than before. In such situation, we are seeking for solutions to minimize the impact of measurement shift in overlay detection induced by process variations. When the accuracy of overlay measurement improved, corrections can be performed effectively according to the feedbacks from metrology results. We build a physical model for simulating overlay metrology employing diffraction based overlay (DBO) principles, which can help to conduct researches on DBO metrology in advanced semiconductor nodes.

In this paper, we present a physical model of the DBO metrology which based on the Finite-Difference Time-Domain (FDTD) method. The basis and principles of model establishment was discussed. After adjusting the model parameters compatible with the actual measurement conditions, the metrology wavelengths which provide the best accuracy and robustness of DBO measurement can be selected through simulations. The results of our study will be demonstrated in this publication.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years