CONFERENCE PROCEEDINGS
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Xiongbang Wei
at Univ of Electronic Science and Technology of China
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Publications (5)
Proceedings Article | 23 December 2013 Paper
Effect of duty cycle on the electrical and optical properties of VOx film deposited by pulsed reactive magnetron sputtering
Proceedings Volume 9043, 90430P (2013) https://doi.org/10.1117/12.2035356
KEYWORDS: Sputter deposition, Vanadium, Thin films, Oxides, Plasma, Crystals, Absorption, Temperature metrology, Oxygen, Refractive index
Proceedings Article | 21 December 2013 Paper
Reactive ion etching and OES endpoint detection of AlCu thin film
Jun Gou, Hui Ling Tai, Jun Wang, Xiong Bang Wei, Ya Dong Jiang
Proceedings Volume 9047, 90470K (2013) https://doi.org/10.1117/12.2042642
KEYWORDS: Etching, Reactive ion etching, Aluminum, Plasma, Gases, Thin films, Chlorine, Semiconducting wafers, Optical lithography, Copper
Proceedings Article | 11 March 2008 Paper
Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films
Xiongbang Wei, Zhiming Wu, Tao Wang, Xiangdong Xu, Jingjing Tang, Yadong Jiang
Proceedings Volume 6984, 69842K (2008) https://doi.org/10.1117/12.792154
KEYWORDS: Thin films, Resistance, Temperature metrology, Vanadium, Sputter deposition, Oxides, Atomic force microscopy, Thin film deposition, Scattering, Thin film devices
Proceedings Article | 11 March 2008 Paper
Substrate effect on the growth and thermal electrical properties of vanadium oxide thin films
Xiongbang Wei, Zhiming Wu, Xiangdong Xu, Tao Wang, Jingjing Tang, Yadong Jiang
Proceedings Volume 6984, 69842J (2008) https://doi.org/10.1117/12.792139
KEYWORDS: Thin films, Glasses, Silicon, Vanadium, Resistance, Oxides, Crystals, Sputter deposition, Thin film deposition, Atomic force microscopy
Proceedings Article | 27 November 2007 Paper
Photovoltaic effect of different thickness vanadium oxide thin film
Xiongbang Wei, Zhiming Wu, Tao Wang, Shibin Li, Jingjing Tang, Yadong Jiang
Proceedings Volume 6723, 672342 (2007) https://doi.org/10.1117/12.783590
KEYWORDS: Thin films, Vanadium, Oxides, Photovoltaics, Thin film solar cells, Resistance, Solar energy, Silicon, Silicon films, Environmental sensing
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