In interferometers, defects on the surface of optical elements can generate coherent noise, such as “Newton’s rings,” in interferograms, thereby affecting measurement accuracy. To address this issue, this paper proposes a method for extending the light source using a multimode fiber. By adjusting the parallel beam coupling into the multimode fiber, the coherent noise of the light source can be eliminated. The proposed method is verified in a Twyman-Green interferometer with a 25.4 mm diameter, employing a multimode fiber with a core diameter of 1 mm. Experimental results demonstrate a 36.9% reduction in scattering contrast and a 43% improvement in signal-to-noise ratio (SNR) of the interferometer when the fiber is moved ±1 mm perpendicular to the optical axis, while maintaining a fixed incidence angle of 1° to the optical axis. These findings confirm the effectiveness of the proposed method.
The phase-shifting algorithms are essential for a Fizeau interferometer to reconstruct the topography of the optical element’s surface or wavefront. There are differences between different algorithms for reconstruction results, especially for the suppression of noise. To acquire a more accurate Instrument transfer function (ITF) which reflects the axial spatial frequency response of a Fizeau interferometer, the algorithm transfer function which represents the characteristics of the calculation process in spatial frequency was proposed. In this paper, numerical simulations calculated and analyzed several transfer functions of the well-known phase-shifting algorithms. Then, the ITFs of a step plate with a height of 118 nm were measured with different algorithms by experiments and the results were analyzed. The simulations and experimental results indicate that the phase-shifting algorithm has an effect on the ITF measurement but it is not a key factor affecting the ITF measurement.
In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.
A design of high-precision 4-in. transmission spheres that can work in wide-band interferometric measurement is proposed. A motorized precision rotation mount is used to drive one of the lenses in the design to make the transmission sphere work at any wavelength in the wavelength range of 532 to 1550 nm, where the F-number of the transmission sphere remains constant during the movement of the lens. OpticStudio software is utilized to verify the design under F-numbers of 1.0, 2.2, and 3.3, and the results show that a transmission sphere with an F-number of 1.0 to 3.3 can be designed based on our model. The tolerance analysis and the secondary adjustment results show that the peak-to-valley transmission wavefront error of the transmission sphere can be controlled within λ / 20 in actual machining and assembly, which meets the requirement of high-precision interferometric measurement.
The giant laser device used in inertial confined fusion (ICF) experimental research is the largest optical engineering ever built by humans. It requires thousands of large-diameter optical components, especially for optical components with diagonal dimensions close to or exceeding 1 meter, which leads to the manufacturing is extremely difficult. Wavefront characteristics are one of the key parameters of meter-size optical components. Since different degrees of wavefront error are introduced during the material preparation, manufacturing and coating processes, it requires precise measurement and precise control throughout the manufacturing process. In this paper, the research work on key problems such as measurement accuracy, measurement aperture and measurement efficiency in the wavefront error detection of meter-size optical components is carried out and summarized.
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