Mr. Xuming Wu Profile

Xuming Wu

at Shanghai Institute of Optics and Fine Mechanics

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Publications (2)

Proceedings Article | 12 December 2003 Paper

Symmetric color separation gratings

Changhe Zhou, Yanyan Zhang, Peng Xi, Enwen Dai, Xuming Wu, Liren Liu

Proceedings Volume 5201, (2003) https://doi.org/10.1117/12.504122

KEYWORDS: Diffraction, Diffraction gratings, Optical design, Photomasks, Manufacturing, Tolerancing, Optical alignment, Micro optics, Solids, Refractive index

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Proceedings Article | 3 November 2003 Paper

Etching quartz with inductively coupled plasma etching equipment

Xuming Wu, Changhe Zhou, Peng Xi, Enwen Dai, Huayi Ru, Liren Liu

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.504001

KEYWORDS: Etching, Quartz, Plasma, Chemical elements, Argon, Plasma etching, Ions, Photoresist materials, Plasma systems, Polymers

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