This paper describes the realization of polymer-based optical structures and the assembly and packaging strategy to connect optical fiber ribbons to the waveguides. For that a low cost fabrication process using the SU-8TM thick photo-resist is presented. This process consists in the deposition of two photo-structurized resist layers filled up with epoxy glue realising the core waveguide. For the assembly, a new modular vacuum gripper was realised and installed on an automatic pick and place assembly robot to mount precisely and efficiently the optical fibers in the optical structures. First results have shown acceptable optical propagation loss for the complete test structure.
KEYWORDS: Electrodes, Objectives, Microscopes, Semiconducting wafers, Gold, Manufacturing, Scanning electron microscopy, Ceramics, X-rays, Control systems
Photoemission electron microscopy (PEEM) has turned out to be one of the most promising methods for surface analysis in the recent years. It is a full field imaging technique based on the emission of secondary electrons by far ultraviolet light or X-rays. The emission intensity of secondary electrons is critically dependent upon the acceptance angle of the incident radiation. However, the size of the microscope restricts this angle substantially. Miniaturizing the objective lens of the microscope reduces the restriction of the acceptance angle and improves the performance of the PEEM considerably. We report on the fabrication of a miniaturized objective lens containing the extraction electrode, the electron column, the contrast aperture and the electron optical correction system for a PEEM. The extraction electrode as well as the electron column have been manufactured using precision milling techniques and electron discharge micromachining. For the fabrication of the correction system (stigmator / bending unit), a process combining aligned photolithography into a thick SU-8 resist and electroforming has been used. All electrodes were made in gold with a height of 150 (mu) m. After attaching a FOTURAN substrate to the electrode and etching under the electrodes, free standing apertures in an octupole and quadruple arrangement were obtained. The outer diameter of the electrodes is 5 mm and the inner diameter is 1 mm, respectively. Each electrode is connect individually to the external power supply which controls their operation. The overall size of the miniaturized objective lens is 23 mm, which has reduced the size of the lens by one order of magnitude when compared to commercially available instruments.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.