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Yanzhe Fu
at National Institute of Metrology
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Publications (1)
Proceedings Article | 18 December 2019 Paper
A novel knife-edge method for measuring the lateral resolution of confocal Raman microscopes
Yanzhe Fu, Xiang Ding, Jiangchao Li, Jiyan Zhang
Proceedings Volume 11337, 113370B (2019) https://doi.org/10.1117/12.2542145
KEYWORDS: Raman spectroscopy, Silicon, Confocal microscopy, Microscopes, Spatial resolution, Polymethylmethacrylate, Point spread functions, Chromium, Coating, Polishing
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