Dr. Yasunari Maekawa Profile

Dr. Yasunari Maekawa

at National Institutes for Quantum Science and Technology

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Publications (2)

Proceedings Article | 1 May 2023 Poster + Paper

Study on irradiation effects by femtosecond-pulsed extreme ultraviolet in resist materials

Yuji Hosaka, Hiroki Yamamoto, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Akira Kon, Shigeki Owada, Yuichi Inubushi, Yuya Kubota, Yasunari Maekawa

Proceedings Volume 12498, 1249827 (2023) https://doi.org/10.1117/12.2670220

KEYWORDS: Polymethylmethacrylate, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Attenuation, Free electron lasers, Film thickness, X-ray lasers, Zirconium, X-rays

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Proceedings Article | 23 March 2020 Paper

Fundamental study on lithographic characteristics of metal oxo clusters for KrF, ArF, and electron beam lithography

Hiroki Yamamoto, Yasunari Maekawa

Proceedings Volume 11326, 113261W (2020) https://doi.org/10.1117/12.2565717

KEYWORDS: Thin films, Silicon, Electron beams, Silicon films, Scanning electron microscopy, Extreme ultraviolet

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