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Yeeun Han
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Publications (1)
Proceedings Article | 26 May 2022 Presentation + Paper
Absolute overlay measurement based on voltage contrast defect inspection with programmed misalignments for DRAM devices
Moosong Lee, Jinsun Kim, Dohyeon Park, Yeeun Han, Junseong Yoon, Seung Yoon Lee, Chan Hwang, Achim Woessner, Cyrus Tabery, Miao Wang, Antonio Corradi, Young-Hoon Song, Yun-A Sung, Thomas Kim, Aileen Soco, Jason Kim, Chih-Hung Hsieh
Proceedings Volume 12053, 1205315 (2022) https://doi.org/10.1117/12.2626721
KEYWORDS: Overlay metrology, Semiconducting wafers, Defect inspection, Metrology, Inspection, Standards development, Image processing, Electronics, Etching, Electrons
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