Dr. Yezheng Tao Profile

Dr. Yezheng Tao

at Univ of California San Diego

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 8 April 2011 Paper

Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, M. Tillack, F. Najmabadi

Proceedings Volume 7969, 796930 (2011) https://doi.org/10.1117/12.881223

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, Nd:YAG lasers, Tin, Ions, Metrology, Extreme ultraviolet lithography, Laser energy, Carbon dioxide lasers

Read Abstract +

Proceedings Article | 20 March 2010 Paper

Experimental and numerical investigations on the density profile of CO2 laser-produced Sn plasma for an EUVL source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, N. Amin, N. Shaikh, M. Tillack, F. Najmabadi

Proceedings Volume 7636, 76360D (2010) https://doi.org/10.1117/12.848407

KEYWORDS: Carbon dioxide lasers, Plasma, Tin, Pulsed laser operation, Carbon dioxide, Extreme ultraviolet, Extreme ultraviolet lithography, Nd:YAG lasers, Laser beam diagnostics, Absorption

Read Abstract +

Proceedings Article | 18 March 2009 Paper

Ablation depth in planar Sn targets during the interaction with a Nd:YAG laser for extreme ultraviolet lithography

Russell Burdt, Sam Yuspeh, Kevin Sequoia, Mark Tillack, Yezheng Tao, Farrokh Najmabadi

Proceedings Volume 7271, 72712Z (2009) https://doi.org/10.1117/12.814233

KEYWORDS: Laser ablation, Ions, Tin, Extreme ultraviolet, Silicon, Plasma, Extreme ultraviolet lithography, Spectroscopy, Pulsed laser operation, Diagnostics

Read Abstract +

Proceedings Article | 18 March 2009 Paper

Effects of the ratio of sphere size to laser focal spot on the dominant in-band EUV emitting region

Sam Yuspeh, Kevin Sequoia, Yezheng Tao, Mark Tillack, Russell Burdt, Farrokh Najmabadi

Proceedings Volume 7271, 727136 (2009) https://doi.org/10.1117/12.814167

KEYWORDS: Plasmas, Extreme ultraviolet, Optical spheres, Absorption, Tin, Extreme ultraviolet lithography, Diagnostics, Performance modeling, Temperature metrology, Laser beam diagnostics

Read Abstract +

Proceedings Article | 13 September 2007 Paper

Dynamics of laser-produced Sn-based plasmas for a monochromatic 13.5 nm extreme ultraviolet source

Y. Tao, M. Tillack, K. Sequoia, R. Burdt, F. Najmabadi

Proceedings Volume 6703, 67030A (2007) https://doi.org/10.1117/12.731032

KEYWORDS: Plasmas, Tin, Extreme ultraviolet, Pulsed laser operation, Absorption, Foam, Solids, Gas lasers, Extreme ultraviolet lithography, Laser energy

Read Abstract +

Proceedings Article | 21 March 2007 Paper

A mass-limited Sn target irradiated by dual laser pulses for an EUVL source

Y. Tao, M. Tillack, K. Sequoia, F. Najimabadi

Proceedings Volume 6517, 65173Q (2007) https://doi.org/10.1117/12.725806

KEYWORDS: Tin, Ions, Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Silicon films, Argon, Silicon, Semiconducting wafers

Read Abstract +

Showing 5 of 6 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years