In this work, the characteristics of the subwavelength patterning through periodic metal gratings are discussed. By
incorporating different structures of metal gratings, the quality improvements in subwavelength pattern generation are
observed in terms of pattern resolution, uniformity and visibility. By using Ag and Al metals, a deep subwavelength
(~λ/12 and ~λ/9) pattern with sufficient visibility, and high uniformity can be achieved. The physical mechanism of the quality improvements based on surface-plasmon polaritons (SPPs) theory is discussed. Finite-difference time-domain
analysis method is used in the simulation.
A novel subwavelength focusing using an nanohole patterned structure or nano-photon sieves(NPS) is proposed. By
employing a nanohole array instead of the ring pattern in conventional Fresnel micro-zone-plate(FMZP) and
incorporating a Gaussian modulation function on the density of the nanohole array, it is found that the side lobes of the
NPS can be effectively suppressed compared with that of FMZP and both the intensity distribution of focal spot and the
side-lobes of focal spot exhibit better symmetric behavior than that of the FMZP. The intensity of electric field at the
focal plane can be further improved by introducing a multi-layer system with a dielectric transition layer(i.e. NaF).
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