Dr. Yongseok Kang
at LG Electronics Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 March 2014 Paper
Yongchan Ban, Jason Sweis, Philippe Hurat, Ya-Chieh Lai, Yongseok Kang, Woo Hyun Paik, Wei Xu, Huiyuan Song
Proceedings Volume 9053, 90530I (2014) https://doi.org/10.1117/12.2046284
KEYWORDS: Design for manufacturing, Manufacturing, Transistors, Yield improvement, Optical lithography, Lithography, Device simulation, Reliability, Semiconductors

Proceedings Article | 28 March 2014 Paper
Yongchan Ban, Changseok Choi, Hosoon Shin, Yongseok Kang, Woo Hyun Paik
Proceedings Volume 9053, 90530P (2014) https://doi.org/10.1117/12.2046207
KEYWORDS: Signal processing, Metals, Clocks, Logic, Chemical mechanical planarization, Lithography, Etching, Design for manufacturing, Resistance

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