Dr. Yong Wang Profile

Dr. Yong Wang

Manager at JSR Engineering Co Ltd

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Author

Publications (3)

Proceedings Article | 11 April 2006 Paper

Application of high-refractive index fluid to KrF-immersion lithography

Yuji Yada, Koji Ito, Yoshikazu Yamaguchi, Taiichi Furukawa, Takashi Miyamatsu, Yong Wang, Katsuhiko Hieda, Tsutomu Shimokawa

Proceedings Volume 6153, 61531W (2006) https://doi.org/10.1117/12.655983

KEYWORDS: Photoresist materials, Lithography, Refractive index, Semiconducting wafers, Immersion lithography, Microfluidics, Absorbance, Transmittance, 193nm lithography, Water

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Proceedings Article | 11 April 2006 Paper

High-refractive-index fluids for the next-generation ArF immersion lithography

Yong Wang, Takashi Miyamatsu, Taiichi Furukawa, Kinji Yamada, Tetsuo Tominaga, Yutaka Makita, Hiroki Nakagawa, Atsushi Nakamura, Motoyuki Shima, Shiro Kusumoto, Tsutomu Shimokawa, Katsuhiko Hieda

Proceedings Volume 6153, 61530A (2006) https://doi.org/10.1117/12.656022

KEYWORDS: Refractive index, Water, Immersion lithography, Ultraviolet radiation, Absorbance, Laser irradiation, Absorption, Photoresist materials, Transmittance, Prisms

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Proceedings Article | 4 May 2005 Paper

Material design for immersion lithography with high refractive index fluid (HIF)

Takashi Miyamatsu, Yong Wang, Motoyuki Shima, Shiro Kusumoto, Takashi Chiba, Hiroki Nakagawa, Katsuhiko Hieda, Tsutomu Shimokawa

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599165

KEYWORDS: Refractive index, Photoresist materials, Water, Immersion lithography, Ultraviolet radiation, Lithography, Transmittance, Semiconducting wafers, Interferometry, Transparency

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