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Young-Gwang Kim
at Korea Research Institute of Standards and Science
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Publications (1)
Proceedings Article | 16 October 2017 Paper
Dual-line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
Proceedings Volume 10451, 104511R (2017) https://doi.org/10.1117/12.2280620
KEYWORDS: Lithography, Optics manufacturing, Optical components, Thermography, Manufacturing, Diffractive optical elements, Polonium, Laser ablation, Photomasks
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