Dr. Yufeng Jin Profile

Dr. Yufeng Jin

at Peking Univ

SPIE Involvement:

Author

SPIE Journal Paper | 25 September 2015

Bonding of copper surface in ambient air using propylene carbonate as passivation layer

Zhiyuan Zhu, Min Yu, Oluwadamilola Phillips, Lisha Liu, Yufeng Jin

JM3, Vol. 14, Issue 03, 034504, (September 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.034504

KEYWORDS: Copper, Oxides, Carbonates, Scanning electron microscopy, Chemical species, Manufacturing, Interfaces, Aluminum, Metals, Oxidation

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SPIE Journal Paper | 11 February 2013

Aluminum-coated silicon wafer bonding with tin intermediate layer

Zhiyuan Zhu, Min Yu, Dayu Tian, Yingwei Zhu, Peiquan Wang, Chenchen Liu, Weimin Wang, Min Miao, Jing Chen, Yufeng Jin

JM3, Vol. 12, Issue 01, 013012, (February 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.1.013012

KEYWORDS: Tin, Aluminum, Wafer bonding, Semiconducting wafers, Silicon, Scanning electron microscopy, Interfaces, Microelectromechanical systems, Roads, Nanolithography

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Proceedings Article | 27 August 2011 Paper

Development of infrared FPA using bimaterial microcantilever arrays

Yufeng Jin, Xiaomei Yu

Proceedings Volume 8191, 819102 (2011) https://doi.org/10.1117/12.898604

KEYWORDS: Staring arrays, Infrared imaging, Silicon, Thermography, Infrared radiation, Infrared detectors, Absorption, Silica, Sensors, Image processing

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Proceedings Article | 7 February 2006 Paper

Process simulation of Kovar-glass-silicon bonding for micromachined combustor

Ying Zhao, Min Miao, Yufeng Jin, Xue Chuan Shan, Chee Khuen Wong

Proceedings Volume 6032, 60320C (2006) https://doi.org/10.1117/12.667859

KEYWORDS: Glasses, Silicon, Semiconducting wafers, Metals, Deep reactive ion etching, Combustion, Prototyping, Microelectromechanical systems, Etching, Manufacturing

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Proceedings Article | 7 February 2006 Paper

Research on micro/nano film getters for vacuum maintenance of MEMS

Yufeng Jin, Ying Zhao

Proceedings Volume 6032, 60320B (2006) https://doi.org/10.1117/12.667858

KEYWORDS: Microelectromechanical systems, Gases, Semiconducting wafers, Molecules, Protactinium, Glasses, Zirconium, Silicon, Packaging, Thin films

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Proceedings Article | 7 February 2006 Paper

High temperature sealing of Kovar-glass-silicon for power MEMS application

Ying Zhao, Min Miao, Yufeng Jin, Shan Xue Chuan, Wong Chee Khuen

Proceedings Volume 6032, 603206 (2006) https://doi.org/10.1117/12.667850

KEYWORDS: Glasses, Silicon, Semiconducting wafers, Microelectromechanical systems, Metals, Deep reactive ion etching, Combustion, Prototyping, Etching, Manufacturing

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Proceedings Article | 23 February 2005 Paper

Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan, Yu Jin, Zhen Wang, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580783

KEYWORDS: Semiconducting wafers, Deep reactive ion etching, Combustion, Etching, Temperature metrology, Silicon, Hydrogen, Prototyping, Photoresist materials, Optical lithography

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Proceedings Article | 22 January 2005 Paper

Universal fixture for assembling and testing of a silicon-based microcombustor

Yufeng Jin, Xue Chuan Shan, Zhenfeng Wang, Haixia Zhang, Chee Khuen Wong

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.588962

KEYWORDS: Combustion, Silicon, Temperature metrology, Hydrogen, Semiconducting wafers, Metals, Interfaces, Crystals, Prototyping, Surface finishing

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Proceedings Article | 2 April 2004 Paper

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Xue Shan, Yoichi Murakoshi, Zhenfeng Wang, H. Lu, Yufeng Jin, Tsuyoshi Ikehara, Ryutaro Maeda, C. Wong

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522918

KEYWORDS: Semiconducting wafers, Etching, Deep reactive ion etching, Plasma, Silicon, Photoresist materials, Photomasks, Ions, Surface roughness, Process control

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Proceedings Article | 16 January 2003 Paper

Investigation of NEG thick film for vacuum packaging of MEMS

Yufeng Jin, Zhi Ping Wang, L. Zhao, P. Lim, J. Wei

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472716

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Coating, Packaging, Glasses, Silicon films, Silicon, Sensors, Protactinium, Zirconium

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Proceedings Article | 16 January 2003 Paper

Dual-function leak detector for MEMS devices

Yufeng Jin, Zhiping Wang, Zhen Feng Wang, X. Shi, P. Lim, Min Miao, X. Shan

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472715

KEYWORDS: Sensors, Microelectromechanical systems, Helium, Silicon, Packaging, Protactinium, Detector development, Optical switching, Glasses, Semiconducting wafers

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Proceedings Article | 15 October 2001 Paper

Micromachined tunable rf capacitor with comb structure

Yufeng Jin, Haixia Zhang, Min Miao, Kun Tang, Zhihong Li

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444745

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Proceedings Article | 18 August 1998 Paper

Electric field in a single-substrate AC-PDP cell with barriers

Yufeng Jin, Jun Xia

Proceedings Volume 3560, (1998) https://doi.org/10.1117/12.319658

KEYWORDS: Electrodes, Dielectrics, Particles, Plasma display panels, Computer simulations, Flat panel displays, Display technology, Luminous efficiency, Optimization (mathematics), Monte Carlo methods

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Showing 5 of 13 publications

SPIE Conference Volume | 25 August 2011

International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies

Conference Committee Involvement (1)

Sensor and Micromachined Optical Device Technologies

24 May 2011 | Beijing, China

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