A tunable reflecting micro-optoelectromechanical systems (MOEMS) micromirror is designed for measuring the actual temperature and color of an object based on comparison of two wavelength response windows, 3-5 and 8-12 µm. The MOEMS micromirror with switching between two positions by an applied electrostatic voltage provides a response to two wavelength windows by tuning the optical resonant cavity. Three different structural models of the tunable micromirror, which are made up of single Al layer with type I legs, single Al layer with type L legs, and double Al/Si3N4 layers with type I legs, are designed and simulated accurately using ANSYS tools on a 35-µm pixel-pitch array. On the basis of the comparsion, the third model, made up of double Al/Si3N4 layers with type I legs, is chosen. With different distances between the MOEMS micromirror and the bottom electrode, the total capacitance of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is calculated as 8.21 V by electrostatic-mechanical coupling analysis, and the maximum stress is 368.744 MPa, which is less than the yield strength of Si3N4 thin film. But if the voltage is increased to ~9.73 V, the micromirror will touch the bottom electrode by pull-in behavior.
A tunable reflecting micromirror made up of two layers of Al and Si3N4 is designed to suspend between the silicon
substrate and the heat sensitive membrane for measuring the actual temperature and color of an object based on
comparison of two wavelength response windows, 3-5 μm and 8-12 μm. The micromirror, switching between two
positions by an applied electrostatic voltage, provides a response to two wavelength windows by tuning the optical
tunable resonant cavity. With different distances between the micromirror and the bottom electrode, the total capacitance
of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is
calculated as 8.21 V by electrostatic-mechanical coupling analysis. But if the voltage is increased to about 9.73 V, the
micromirror will touch the bottom electrode by pull-in behavior. At last, the vibration modes of the tunable micromirror
are simulated using ANSYS, and the fabrication process flow of the two-color microbolometer is theoretically
demonstrated.
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