Mr. Yuhei Sumiyoshi Profile

Yuhei Sumiyoshi

at Canon Inc

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Publications (2)

Proceedings Article | 31 March 2014 Paper

The solution to enhance i-line stepper applications by improving mix and match process overlay accuracy

Yuhei Sumiyoshi, Ryo Sasaki, Yasuo Hasegawa, Kentaro Ushiku, Hirotaka Sano, Atsushi Shigenobu, Bunsuke Takeshita, Seiya Miura

Proceedings Volume 9052, 90520H (2014) https://doi.org/10.1117/12.2046769

KEYWORDS: Semiconducting wafers, Distortion, Image processing, Optical alignment, Image sensors, Silicon, Lithography, Overlay metrology, Wafer bonding, Infrared radiation

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Proceedings Article | 12 May 2005 Paper

Analysis of precise CD control for 45nm node and beyond

Yuhei Sumiyoshi, Koji Mikami, Yasuo Hasegawa, Toshiyuki Yoshihara, Yoshiyuki Nagai, Akihiro Yamada, Ken-ichiro Mori, Takahisa Ogawa, Shigeyuki Suda

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600926

KEYWORDS: Critical dimension metrology, Projection systems, Wavefront aberrations, Distortion, Fiber optic illuminators, Transmittance, Chromatic aberrations, Photoresist processing, Wavefronts, Control systems

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