CONFERENCE PROCEEDINGS
Advanced Search
Yuji Awano
at Fujitsu Labs Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 25 March 2005 Paper
Carbon nanotube technologies for future ULSI via interconnects
Proceedings Volume 5732, (2005) https://doi.org/10.1117/12.580083
KEYWORDS: Chemical vapor deposition, Particles, Carbon nanotubes, Nickel, Electrodes, Resistance, Nanotechnology, Metals, Atmospheric particles, Copper
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top