Mr. Yukihide Kajimoto Profile

Yukihide Kajimoto

at Plasma-Therm LLC

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 December 2022 Poster + Paper

Yuan Hsu, Will Hsiao, Cy Huang, Leo Lo, Michael Morgan, Yukihide Kajimoto

Proceedings Volume 12293, 122930T (2022) https://doi.org/10.1117/12.2627280

KEYWORDS: Thin films, Plasma, Chlorine, Particles, Contamination, Electrodes, Aluminum, Scanning electron microscopy, Inspection, Etching

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Keywords/Phrases