Rayleigh backscattering noise in resonator integrated optic gyroscopes is researched both theoretically and experimentally. Characteristics of Rayleigh backscattering noise in the resonator of silicon nitride on silicon substrate are formulized, and the static state and dynamic state models are constructed. The relationship between the optical signal and backscattering noise is simulated, and the affection between the interference signal of backscattering noise and the reverse optical signal is also calculated. The influence of backscattering noise on the performance of the resonator is analyzed. The method of inflicting two different waveforms to the integrated optical modulator is presented. The experimental results show that triangular wave modulation can effectively suppress backscattering noise in resonator integrated optic gyroscopes.
Large-scale waveguide ring resonators are key elements in micro-optical gyroscopes. In this paper, by using the nondegenerate two-photon laser lithography technology, we fabricated a silicon nitride waveguide ring resonator on the SiO2 substrate with a coupling distance of 600nm. The FSR of the WRR we prepared is 10GHz, the finesse of the WRR is 2.3, and the Q value is 4.5ⅹ104 . The fabrication process shows the ability that femtosecond laser lithography can be processed on an insulating substrate at the nanometer scale.
Resonantor Integrated Optic Gyro (RIOG) is a type of high-accuracy gyroscope based on the Sagnac effect. The shape of the resonance curve determines the limited sensitivity of RIOG. Any asymmetry of the resonance curve will not only induce a bias error into the gyro output, but also decrease the frequency discrimination coefficient of the demodulation curve. The differential nomal mode loss is suspected to be the major noise induces the resonance curve asymmetry. In this paper, the normal mode effect is fully investigated and the conclusions are verified by Finite-Difference Time-Domain (FDTD) simulation software. Two kinds of asymmetry resonance line shape were found in experiment. Analysis shows that the bending direction of the resonance curve is related to the sidewall roughness between coupler inside and outside, and the resonance asymmetry ratio is linearly proportional to the two nomal modes throughput difference.
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