Dr. Yuri V. Miklyaev Profile

Dr. Yuri V. Miklyaev

Docent at LIMO GmbH

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Author

Publications (17)

Proceedings Article | 7 February 2012 Paper

Efficient beam splitting with continuous relief DOEs and microlens arrays

Aliaksei Krasnaberski, Yuri Miklyaev, Denis Pikhulya, Lisa Kleinschmidt, Waleri Imgrunt, Mikhail Ivanenko, Vitalij Lissotschenko

Proceedings Volume 8236, 823609 (2012) https://doi.org/10.1117/12.908784

KEYWORDS: Beam splitters, Diffraction, Diffractive optical elements, Microlens array, Optics manufacturing, Manufacturing, Diffraction gratings, Computer simulations, Laser damage threshold, Glasses

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Diffractive optical elements (DOEs) are of rising importance for many industrial laser applications, especially for laser beam shaping and laser beam splitting. Typically, such applications require high damage threshold of the diffractive optical elements as well as high diffraction efficiency. Usually DOEs with multilevel (step-like) phase profiles are made microlithographically and suffer from "quantisation" errors and scattering on profile derivative discontinuities. The steplike structure lowers the DOE damage threshold compared to the intrinsic material values. LIMO's microoptical technology is suitable for the production of high-precision free programmable continuous surface profiles in optical glasses, crystals and metals. It can be applied for manufacturing of microlens and micro-mirror arrays as well as for manufacturing of diffractive optics with continuous reliefs. Both the arrays and DOEs with continuous relief are suitable for high efficiency laser beam splitting. However, the design approaches to obtain a desirable solution for the corresponding continuous phase profiles are different. The results of the wave-optical simulations made by LIMO's own program and by VirtualLab software, and experimental studies for a 1 to 11 beam splitter with a continuous profile for the wavelength of 532 nm are presented. Continuous phase profiles for the DOEs were designed by a procedure based on the theory of beam splitting by a phase grating. Comparative theoretical and experimental studies were also done for splitting with a double-sided microlens array. For both types of beam splitting the efficiency can be very high (> 98%). The DOEs show especially high homogeneities of the resulting intensity distribution, however, they are much more sensitive to wavelength variations. The microlens arrays demonstrate even weaker ghost orders as the DOE splitters and their surface profiles are simpler. However, the efficiency and homogeneity suffer on interlens gaps.

Proceedings Article | 19 February 2011 Paper

Multistage phased electro-optical planar arrays for the manipulation of high power laser beams

M. Ivanenko, A. Krasnaberski, A. Mikhailov, Y. Miklyaev, L. Aschke, V. Lissotschenko

Proceedings Volume 7913, 79130E (2011) https://doi.org/10.1117/12.874629

KEYWORDS: Waveguides, Electro optics, Phased arrays, Control systems, Switching, Electrodes, Wavefronts, High power lasers, Optical resolution, Planar waveguides

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Proceedings Article | 19 February 2011 Paper

Efficient diffractive optical elements from glass with continuous surface profiles

Yu. Miklyaev, A. Krasnaberski, M. Ivanenko, A. Mikhailov, W. Imgrunt, L. Aschke, V. Lissotschenko

Proceedings Volume 7913, 79130B (2011) https://doi.org/10.1117/12.874642

KEYWORDS: Diffractive optical elements, Beam splitters, Diffraction, Glasses, Attenuators, Laser damage threshold, Diffraction gratings, Manufacturing, Laser processing, Etching

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Proceedings Article | 14 May 2010 Paper

Fabrication of three-dimensional metallodielectric photonic crystals by interference lithography

P. Dyachenko, S. Karpeev, E. Fesik, Yu. Miklyaev, V. Pavelyev, G. Malchikov

Proceedings Volume 7713, 77131J (2010) https://doi.org/10.1117/12.853791

KEYWORDS: Photonic crystals, Photoresist materials, Lithography, Gold, Nanoparticles, Absorption, Coating, Holography, Helium cadmium lasers, Metals

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Proceedings Article | 13 May 2010 Paper

Novel approach for manufacturing of continuously shaped diffractive optical elements

Vladimir Pavelyev, Yuri Miklyaev, Waleri Imgrunt, Maxim Bolshakov, Denis Kachalov, Victor Soifer, Lutz Aschke, Vitaly Lissotschenko

Proceedings Volume 7716, 77161N (2010) https://doi.org/10.1117/12.854836

KEYWORDS: Beam splitters, Diffractive optical elements, Optics manufacturing, Lithographic illumination, Optical design, Diffraction gratings, Optical components, Manufacturing, Micro optics, Lithography

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Optical lithography with its 193nm technology is pushed to reach and shift its limits even further. There is strong demand on innovations in illumination part of exposure tools. Current illumination systems consisting of diffractive and refractive optical elements offer numerous benefits such as optimized laser beam shape with high homogeneity and high numerical aperture enabling high efficiency. LIMO's unique production technology is capable to manufacture free form surfaces on monolithic arrays larger than 250mm with high precision and reproducibility. Different kinds of intensity distributions with best uniformities or customized profiles have been achieved by using LIMO's refractive optical elements. Recently LIMO pushed the limits of this lens production technology and was able to manufacture first diffractive optical elements (DOE) based on continuous relief's profile. Beside for the illumination devices in lithography, DOEs find wide use in optical devices for other technological applications, such as optical communications and data processing. Up to now DOE designs follow the principle of phase diffraction gratings. Its diffraction structure with a periodic phase profile performs a superposition of beams with predefined energy ratios. Due to the application for high precise laser-beam shaping and beam splitting in optical technologies and optical fiber networks, number of grating orders is increased up to some tens or even hundreds. Classic lithographic technologies lead to quantized (step-like) profiles of diffractive micro-reliefs, which causes a decrease of beam splitter's diffractive efficiency. The newest development of LIMO's microlens fabrication technology allows us to make a step from free programmable microlens profiles to diffractive optical elements with high efficiency. Our first results of this approach are demonstrated in this paper. Diffractive beam splitters are presented. A special mathematical method is used to design diffractive optical elements with continuous surface profiles. Comparison between theoretical simulations and experimental results shows very good correlation.

Proceedings Article | 4 March 2010 Paper

Novel continuously shaped diffractive optical elements enable high efficiency beam shaping

Yuri Miklyaev, Waleri Imgrunt, Vladimir Pavelyev, Denis Kachalov, Tanja Bizjak, Lutz Aschke, Vitalij Lissotschenko

Proceedings Volume 7640, 764024 (2010) https://doi.org/10.1117/12.846573

KEYWORDS: Beam splitters, Diffractive optical elements, Manufacturing, Beam shaping, Optics manufacturing, Optical components, Lithographic illumination, Micro optics, Diffraction gratings, Lithography

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Proceedings Article | 19 February 2009 Paper

Fast laser-beam deflector based on electro-optical arrays

M. Ivanenko, A. Krasnaberski, A. Mikhailov, Y. Miklyaev, Y. Kolotushkin, V. Grimm, K. Bagschik, V. Lissotschenko

Proceedings Volume 7194, 719406 (2009) https://doi.org/10.1117/12.808202

KEYWORDS: Electro optics, Microlens array, Phased array optics, Laser processing, Control systems, Electronics, Phased arrays, Switching, Geometrical optics, Microlens

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Proceedings Article | 13 February 2009 Paper

Ultra-narrow long green lines for laser crystallization of Si

Mikhail Ivanenko, Klaus Bagschik, Yuri Miklyaev, Alexei Mikhailov, Wyacheslaw Grimm, Vitalij Lissotschenko

Proceedings Volume 7194, 719402 (2009) https://doi.org/10.1117/12.808196

KEYWORDS: Laser crystals, Silicon, Pulsed laser operation, Crystals, Laser sintering, Optics manufacturing, Semiconductor lasers, Homogenization, Laser systems engineering, Diode pumped solid state lasers

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Proceedings Article | 21 April 2008 Paper

Complete photonic band gap in icosahedral quasicrystals with a body-centered six-dimensional lattice

P. Dyachenko, V. Dmitrienko, Yu Miklyaev, V. Pavelyev

Proceedings Volume 6989, 69891T (2008) https://doi.org/10.1117/12.780760

KEYWORDS: Dielectrics, Chemical species, Photonic crystals, Optical spheres, Crystals, Diamond, Photons, Microwave radiation, Silicon, Image processing

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Proceedings Article | 14 February 2008 Paper

Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si

Mikhail Ivanenko, Alexei Mikhailov, Yuri Miklyaev, Wyacheslaw Grimm, Klaus Bagschik, Andreas Hildebrandt, Vitalij Lissotschenko

Proceedings Volume 6879, 68790P (2008) https://doi.org/10.1117/12.762091

KEYWORDS: Laser crystals, Diode pumped solid state lasers, Silicon, Crystals, Semiconductor lasers, Homogenization, Prototyping, Cameras, Liquid crystal on silicon, Nd:YAG lasers

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Proceedings Article | 12 September 2007 Paper

Beam shaping on the base of micro lenslet arrays with the help of diffraction and interference effects

Yu. Miklyaev, D. Hauschild, A. Mikhailov, V. Lissotschenko

Proceedings Volume 6663, 666308 (2007) https://doi.org/10.1117/12.738017

KEYWORDS: Beam shaping, Diffraction, Electro optics, Raster graphics, Lenses, Software development, Control systems, Optical design, Beam steering, Solid state lasers

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Proceedings Article | 21 June 2006 Paper

How refractive microoptics enable lossless hyper-NA illumination systems for immersion lithography

H. Ganser, M. Darscht, Y. Miklyaev, D. Hauschild, L. Aschke

Proceedings Volume 6281, 62810P (2006) https://doi.org/10.1117/12.692704

KEYWORDS: Semiconducting wafers, Micro optics, Photomasks, Microlens, Cylindrical lenses, Beam shaping, Lithographic illumination, Chemical elements, Polarization, Immersion lithography

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Proceedings Article | 18 April 2006 Paper

Band structure calculations of 2D photonic pseudoquasicrystals obtainable by holographic lithography

P. Dyachenko, Yu. Miklyaev

Proceedings Volume 6182, 61822I (2006) https://doi.org/10.1117/12.662380

KEYWORDS: Dielectrics, Photonic crystals, Holography, Crystals, Lithography, Refractive index, Crystal optics, Dispersion, Chemical species, Dielectric polarization

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Proceedings Article | 15 March 2006 Paper

High-throughput homogenizers for hyper-NA illumination systems

H. Ganser, M. Darscht, Y. Miklyaev, D. Hauschild, L. Aschke

Proceedings Volume 6154, 61542N (2006) https://doi.org/10.1117/12.656402

KEYWORDS: Semiconducting wafers, Photomasks, Microlens, Cylindrical lenses, Micro optics, Polarization, Beam shaping, Chemical elements, Microlens array, Sodium

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Proceedings Article | 23 September 1998 Paper

Beam and fiber coupler by phase conjugation

Yu. Miklyaev, V. Safonov

Proceedings Volume 3488, (1998) https://doi.org/10.1117/12.323709

KEYWORDS: Resonators, Crystals, Phase conjugation, Reflectivity, Fiber couplers, Mirrors, Multimode fibers, Optical fibers, Oscillators, Four wave mixing

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Proceedings Article | 23 September 1998 Paper

Photorefractive frequency demultiplexer based on modulation of speckle patterns

Yu. Miklyaev, M. Darscht

Proceedings Volume 3488, (1998) https://doi.org/10.1117/12.323707

KEYWORDS: Modulation, Speckle pattern, Polarization, Crystals, Energy transfer, Laser crystals, Demultiplexers, Multimode fibers, Signal detection, Phase modulation

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Proceedings Article | 23 September 1998 Paper

Photorefractive grating formation by phase-modulated light beams in external AC field

Yu. Miklyaev, A. Valeyev, I. Tsarev

Proceedings Volume 3488, (1998) https://doi.org/10.1117/12.323708

KEYWORDS: Crystals, Phase shift keying, Modulation, Phase modulation, Diffraction gratings, Diffraction, Laser crystals, Holograms, Spatial frequencies, Signal processing

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Showing 5 of 17 publications

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