Dr. Yury R. Vinetsky Profile

Dr. Yury R. Vinetsky

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Publications (4)

Proceedings Article | 20 January 2005 Paper

Development of nondestructive optical method and experimental setup for interstitial O:Si mapping with tens-of-microns locality

Yuri Vinetski, Mikhail Trishenkov, Nikolay Kravtchenko, Anatoly Filachov

Proceedings Volume 5628, (2005) https://doi.org/10.1117/12.567053

KEYWORDS: Semiconducting wafers, Silicon, Oxygen, Spatial resolution, Signal detection, Light sources, Sensors, Absorption, Nondestructive evaluation, Wafer-level optics

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Proceedings Article | 30 September 2003 Paper

A comparative study and optimal choice of the method of determination of interstitial oxygen-in-silicon concentration from optical transmission spectra

Yu. Vinetski, V. Famitski, A. Titov, P. Khakuashev

Proceedings Volume 5126, (2003) https://doi.org/10.1117/12.517414

KEYWORDS: Semiconducting wafers, Silicon, Oxygen, Transmittance, Surface finishing, Polishing, Spectrophotometry, Spectral resolution, Plasma etching, Spatial resolution

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Proceedings Article | 30 September 2003 Paper

Improvement of optical method of oxygen-in-silicon characterization and design consideration in measuring setup for detailed nondestructive mapping of interstitial oxygen

Yu. Vinetski, A. Titov, M. Trishenkov

Proceedings Volume 5126, (2003) https://doi.org/10.1117/12.517412

KEYWORDS: Semiconducting wafers, Oxygen, Signal detection, Sensors, Silicon, Wafer-level optics, Light sources, Absorption, Spatial resolution, Palladium

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Proceedings Article | 28 November 2000 Paper

Software for simulation of image conversion in IR TDI systems and optimizing TDI focal plane arrays

Sergey Orlov, Yury Vinetsky

Proceedings Volume 4340, (2000) https://doi.org/10.1117/12.407760

KEYWORDS: Photodetectors, Modulation transfer functions, Staring arrays, Image processing, Multiplexers, Electro optical modeling, Data modeling, Thermography, Software development, Systems modeling

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