Measuring light’s information of polarization and phase in real time is very important in optics. Since metasurfaces enable the wavefront manipulation, which can replace some conventional optical components and make the system extremely compact. Here, we apply the concept of metasurface to system level, creating a generalized Hartmann-Shack array based on 3×2 sub-arrays of silicon-based metalenses for optical multi-parameters detection, which not only measures phase and phase-gradient profiles of optical beams but also measures spatial polarization profiles at the same time. The silicon-based metalenses, with a numerical aperture of 0.32 and a mean measured focusing efficiency in transmission mode of 28% at a wavelength of 1550 nm. Furthermore, we demonstrate detections of a radially polarized beam, an azimuthally polarized beam and a vortex beam.
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