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Zhe Zhang
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
A new metrology technique for defect inspection via coherent Fourier scatterometry using orbital angular momentum beams
Proceedings Volume 11611, 116110L (2021) https://doi.org/10.1117/12.2584728
KEYWORDS: Scatterometry, Defect inspection, Metrology, Model-based design, Defect detection, Cameras, Signal to noise ratio, Sensors, Extreme ultraviolet, X-rays
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