Dr. Zhenhai Zhu Profile

Dr. Zhenhai Zhu

at Cadence Design Systems Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 7 March 2008 Paper

Zhenhai Zhu, Frank Schmidt

Proceedings Volume 6924, 69243I (2008) https://doi.org/10.1117/12.772987

KEYWORDS: Photomasks, Finite element methods, Lithography, Matrices, Linear elements, Error analysis, Diffraction, Polarization, Solids, Phase shifts

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Keywords/Phrases