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Zhenming Ji
at Luoyang Optoelectro Technology Development Center
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Publications (1)
Proceedings Article | 27 March 2022 Paper
Effects of different passivation and etching methods on the dark current of InAs/GaSb long-wave detectors
Zhenming Ji, Xubo Zhu, Yingjie He, Ailiang Cui, Peng Wei, Yanqiu Lyu
Proceedings Volume 12169, 1216983 (2022) https://doi.org/10.1117/12.2625096
KEYWORDS: Superlattices, Silicon, Etching, Infrared detectors, Sensors, Semiconducting wafers, Silicon films, Silica, Gallium antimonide, Wet etching
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