Grating is an important optical element widely used in high power laser system which is required for higher diffraction efficiency and high laser damage threshold. Compared with the traditional grating materials, diamond has excellent optical transmission properties, high anti-damage threshold, high thermal conductivity etc. Diamond grating has wide application prospect in high power laser system. Based on rigorous couple wave analysis method (RCWA) diffraction characteristics of diamond gratings with different structures were simulated and optimized; Also the diffraction characteristics of between diamond gratings and fused silica gratings were compared and analyzed. The studies showed that the optimized diamond grating could obtain high diffraction efficiency more than 94% in wider bandwidth and the bulk of diamond grating would be much smaller than that of fused silica gratings.
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