Zhiqiang Wang
at China Academy of Engineering Physics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 May 2017 Paper
Zhiqiang Wang, Hongwei Yan, Xiaodong Yuan, Yuan Li, Ke Yang, Lianghong Yan, Lijuan Zhang, Taixiang Liu, Heyang Li
Proceedings Volume 10173, 1017325 (2017) https://doi.org/10.1117/12.2267494
KEYWORDS: Etching, Silica, Laser induced damage, Resistance, Laser damage threshold, HF etching, Deep ultraviolet, Luminescence, Surface roughness, Atomic force microscopy

Proceedings Article | 12 May 2017 Paper
Proceedings Volume 10173, 101730C (2017) https://doi.org/10.1117/12.2267745
KEYWORDS: Infrared radiation, Silica, Etching, Laser damage threshold, Laser induced damage, Silicon, Absorption, Surface finishing, Polishing, Optics manufacturing

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