Dr. Zuobin Wang Profile

Dr. Zuobin Wang

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Publications (9)

Proceedings Article | 24 February 2009 Paper

Interference lithography processes with high-power laser pulses

A. Rodriguez, M. Ellman, I. Ayerdi, N. Perez, S. Olaizola, J. Zhang, Z. Ji, T. Berthou, C. Peng, Y. Verevkin, Z. Wang

Proceedings Volume 7201, 72010R (2009) https://doi.org/10.1117/12.808834

KEYWORDS: Lithography, Laser systems engineering, Optical lithography, Electron beam lithography, Photoresist materials, Laser processing, Pulsed laser operation, Control systems, Beam splitters, Mirrors

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Proceedings Article | 12 June 2007 Paper

Formation of 4-beam laser interference patterns for nanolithography

Jin Zhang, Zuobin Wang, Yury Verevkin, Santiago Olaizola, Changsi Peng, Chunlei Tan, Ainara Rodriguez, Eric Daume, Thierry Berthou, Stéphane Tisserand, Ze Ji

Proceedings Volume 6593, 65930I (2007) https://doi.org/10.1117/12.723782

KEYWORDS: Lithography, Nanolithography, Laser applications, Electron beam lithography, Control systems, Beam splitters, Nanotechnology, Laser systems engineering, Scanning probe lithography, Optical lithography

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Proceedings Article | 17 October 2006 Paper

Reference pattern-based 2D measurement with nano resolution

Zuobin Wang, Shizhong Su, Yury Konstantinovich Verevkin, Sergej Fatikow

Proceedings Volume 6376, 63760M (2006) https://doi.org/10.1117/12.685924

KEYWORDS: Lithography, Manufacturing, Image processing, Packaging, Statistical analysis, Scanning electron microscopy, Nanotechnology, 193nm lithography, Optical lithography, Fringe analysis

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Proceedings Article | 13 June 2001 Paper

Analysis of oblique fringes by fringe pattern matching

Zuobin Wang, Chenggen Quan, Peter Bryanston-Cross

Proceedings Volume 4317, (2001) https://doi.org/10.1117/12.429564

KEYWORDS: Fringe analysis, Phase shifts, Statistical analysis, Computer simulations, Astatine, Image processing, Speckle, Systems engineering, Mechanical engineering, Product engineering

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Proceedings Article | 17 September 1997 Paper

Two methods for achieving subpixel resolution in phase difference determination by fringe pattern matching

Zuobin Wang, Peter Bryanston-Cross, Duc-Truong Pham

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281168

KEYWORDS: Fringe analysis, Phase measurement, Computer simulations, Image resolution, Phase shifts, Spatial resolution, Imaging systems, Mirrors, Optical interferometry, Interferometers

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SPIE Journal Paper | 1 September 1997

Effect of image patch size on phase difference determination by fringe pattern matching

Zuobin Wang, Peter Bryanston-Cross, David Whitehouse

OE, Vol. 36, Issue 09, (September 1997) https://doi.org/10.1117/12.10.1117/1.601473

KEYWORDS: Fringe analysis, Phase measurement, Image processing, Computer simulations, Speckle, Phase shifts, Interferometry, Imaging systems, Interferometers, Superposition

Proceedings Article | 18 September 1996 Paper

Displacement measurement based on Young's experiment

Zuobin Wang, Peter Bryanston-Cross, Hongwei Long

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250812

KEYWORDS: Fiber optics tests, Fiber optics, Interferometers, Image resolution, Fringe analysis, Computer simulations, Machine vision, Computing systems

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Proceedings Article | 19 August 1996 Paper

Phase-shifting interferometry with precise phase steps

Zuobin Wang, Peter Bryanston-Cross, Richard Davies

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246772

KEYWORDS: Fringe analysis, Phase interferometry, Phase shifts, Computer simulations, Turbulence, Phase measurement, 3D metrology, Phase shift keying, Image resolution, CCD cameras

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SPIE Journal Paper | 1 August 1996

Phase-shifted image matching algorithm for displacement measurement

Zuobin Wang, M. Graca, Peter Bryanston-Cross, David Whitehouse

OE, Vol. 35, Issue 08, (August 1996) https://doi.org/10.1117/12.10.1117/1.600808

KEYWORDS: Fringe analysis, Phase shifts, Sensors, Interferometers, Fiber optics, Phase measurement, Signal to noise ratio, Fiber optics tests, Calibration, Interferometry

Showing 5 of 9 publications

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