Digital holographic microscopy is a new real-time 3D measurement technique, which is designed and installed by optical holography, microscopic imaging and optical information processing. Compared with the traditional optical holography, CCD camera is used instead of the conventional silver to record holograms, and it is reconstructed by digital reference wave-front. Firstly, based on optical holographic principle, the optical system of digital holographic microscopy is designed. And then, the technical parameter of the key optical elements is analyzed, and its whole mechanical fixed structure is designed using SOLIDWORKS software. Lastly, the experiment device is installed, and the steady holograms are obtained by CCD camera. Based on the reliable digital holograms, the digital reconstructed software is developed by Visual C++ 2010. And the corresponding programming modules are debugged, for example FFT computing module, angular spectrum method module, 3D surface display module, and so on. Finally, micro-lens array is used as contrast experiment sample under-test, the perfect phase data can be obtained through the developed hardware and software of digital holographic microscopy, and also, well intensity image of sinusoidal grating, scratch, cicada moth and onion epidermal is acquired in the trial experiments.
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