Compared with laser interferometer, grating displacement sensor has the advantages of small size, low cost, and strong environmental robustness. In this paper, a grating displacement sensor was proposed. The theoretical model of the grating displacement sensor was established using the optical effect of Doppler shift and linearly polarized light interference. Based on this model, the error of the grating constant and the displacement of grating during measurement were analyzed to achieve the measurement accuracy of the grating displacement sensor. The analysis result showed that when the error of grating constant or the displacement of grating increases, the measurement accuracy will decrease. By changing the error of grating constant or the displacement of grating, 42 sets of measurement accuracy were calculated. The analysis result will provide an important reference for the development of nanometer accuracy grating displacement sensors.
Compared with other non-contact displacement sensors, the chromatic confocal sensor, which based on wavelengthdisplacement modulation technique, has no special requirements on the material and texture of the measured surface, and suitable for measuring the displacement of objects whose size range from micro to macro with high precision. In this paper, the chromatic confocal method is applied to measure the micro displacement. A hyperchromats with a measurement range of 1.27mm and linear regression coefficient R2 of 0.996 has been designed by using ZEMAX optical design software. The experimental system of chromatic confocal displacement measurement is set up. Through two miniature fiber optic spectrometers, the large measurement range and high precision spectrum detection are realized. The system error is calibrated synthetically. The measurement range of 1.2mm and linear regression coefficient R2 of 0.997 is realized. The research results are of great significance for the development of micro-nanometer displacement measurement technology.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.