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Masahiro Kawagishi
at AGC Electronics Co Ltd
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Publications (1)
Proceedings Article | 1 April 2013 Paper
Homogeneity improvement of TiO2-SiO2 glass synthesized by the soot method and its evaluation using the ultrasonic measurement system
Proceedings Volume 8679, 86791N (2013) https://doi.org/10.1117/12.2011655
KEYWORDS: Glasses, Polishing, Surface finishing, Ultrasonics, Extreme ultraviolet lithography, Birefringence, Line scan image sensors, Optical components, Polarization, Titanium dioxide
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