To meet the growing demand for high efficiency stealth dicing (SD), generating dual-focus in silicon to produce double dicing paths has been widely used. However, the challenges in dual-focus SD are the aberration compensation methods based on spatial light modulators (SLM). Until now, the effect of SLM flyback regions that causes focusing intensity reduction has not been considered. Here, an aberration compensation method that considers the effect of SLM flyback regions is proposed to enhance the focusing intensity. This method takes into account not only the total number of flyback regions but also their distribution corresponding to the laser intensity distribution. In addition, the total area of flyback regions is utilized to quantify the impact and determine the optimal compensating phase pattern. Through simulations and experiments, we investigate the generation and control of aberration compensated dual foci. The simulated results demonstrate excellent agreement with theoretical analysis. Moreover, a back crack propagation of 29.9 μm is achieved in the dual-focus SD experiment.
The most problematic aberrations in 3D DLW are related to mismatched refractive index at surface of the sample. Adaptive optical element placed in a plane conjugate to the objective pupil can be used to apply the correcting phase, providing a promising aberration correction. Currently, the calculation of correcting phase are all based on the assumption of ideal objective lens. In practice, secondary aberration is introduced due to the use of actual objective lens, and has not been researched. In this paper, we compare ideal objective lens and actual objective lens in theory, and simulate the energy distribution inside of sample. The effect of secondary aberration on DLW performance is reported. We make compensation for the secondary aberration, and contract the energy distribution of correcting secondary aberration and without correcting secondary aberration. Correction of secondary aberration caused by actual objective lens provides a more accurate correcting method of 3D DLW.
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