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Prof. Wei Huang
at ciomp
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Publications (1)
Proceedings Article | 5 November 2014 Paper
Polarization aberration function for perturbed lithographic lens
Wei Huang, Xiangru Xu, Mingfei Xu, Weicai Xu, Zhaoxin Tang
Proceedings Volume 9272, 92720G (2014) https://doi.org/10.1117/12.2073629
KEYWORDS: Polarization, Zernike polynomials, Lithography, Apodization, Manufacturing, Wavefronts, Resolution enhancement technologies, Wavefront aberrations, Error analysis, Tolerancing
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