Motion error of slider plays key role in 3-PUU parallel coordinates measuring machine (CMM) performance and influence the CMM accuracy, which attracts lots of experts eyes in the world, Generally, the analysis method is based on the view of space 6-DOF. Here, a new analysis method is provided. First, the structure relation of slider and guideway can be abstracted as a 4-bar parallel mechanism. So, the sliders can be considered as moving platform in parallel kinematic mechanism(PKM). Its motion error analysis is also transferred to moving platform position analysis in PKM. Then, after establishing the positive and negative solutions, some existed theory and technology for PKM can be applied to analyze slider straightness motion error and angular motion error simultaneously. Thirdly, some experiments by autocollimator are carried out to capture the original error data about guideway its own error, the data can be described as straightness error function by fitting curvilinear equation. Finally, the Straightness error of two guideways are considered as the variation of rod length in parallel mechanism, the slider’s straightness error and angular error can be obtained by putting data into the established model. The calculated result is generally consistent with experiment result. The idea will be beneficial on accuracy calibration and error correction of 3-PUU CMM and also provides a new thought to analyze kinematic error of guideway in precision machine tool and precision instrument.
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