Dr. Yuejing Qi Profile

KEYWORDS: Digital Light Processing, Distortion, Lens design, Modulation transfer functions, Digital micromirror devices, Prisms, Monochromatic aberrations, Image quality, Zemax, Micromirrors

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Proceedings Article | 24 March 2017 Paper

Image acquisition and motion positioning system design based on the projection lens wavefront aberration measurement

Xiaoquan Han, Bing Li, Yuejing Qi, Guangyi Liu

Proceedings Volume 10147, 1014720 (2017) https://doi.org/10.1117/12.2257455

KEYWORDS: Image acquisition, Wavefront aberrations, Interferometry, Lithography, Diffraction, Imaging systems, Control systems design, Image quality, Wave propagation, Motion detection, Image processing, Motion measurement, Control systems, Image sensors, Image analysis

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Proceedings Article | 15 March 2016 Paper

Confocal position alignment in high-precision wavefront error metrology using Shack-Hartmann wavefront sensor

Jiani Su, Zengxiong Lu, Yuejing Qi, Guangyi Liu, Qingbin Meng

Proceedings Volume 9780, 97801N (2016) https://doi.org/10.1117/12.2218506

KEYWORDS: Collimators, Wavefront sensors, Inspection, Optical alignment, Lithography, Confocal microscopy, Wavefronts, Metrology, Wavefront reconstruction, Zernike polynomials, Monochromatic aberrations, Sensors

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Proceedings Article | 7 August 2015 Paper

Analysis of the pinhole array illumination source for high precision wavefront error metrology

Zengxiong Lu, Yuejing Qi, Qingbin Meng, Jiani Su, Guangyi Liu

Proceedings Volume 9623, 962302 (2015) https://doi.org/10.1117/12.2191100

KEYWORDS: Wavefronts, Spherical lenses, Metrology, Diffraction, Collimators, Error analysis, Wavefront sensors, Optical testing, Aluminum, Gold

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Proceedings Article | 5 August 2015 Paper

Effect of ambient temperature on the measurement accuracy of Shack-Hartmann wavefront sensor

Qingbin Meng, Yuejing Qi, Zengxiong Lu, Jiani Su

Proceedings Volume 9621, 96210H (2015) https://doi.org/10.1117/12.2193109

KEYWORDS: Wavefronts, Temperature metrology, Wavefront sensors, Wavefront reconstruction, Charge-coupled devices, Zemax, Sensors, Error analysis, Optical fibers, Optical testing

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Proceedings Article | 18 September 2014 Paper

A new illumination source for Shack-Hartmann wavefront sensor

Yuejing Qi, Zengxiong Lu, Gongming Ding, Jiani Su

Proceedings Volume 9282, 928205 (2014) https://doi.org/10.1117/12.2068294

KEYWORDS: Wavefront sensors, Wavefronts, Spherical lenses, Projection systems, Gold, Metrology, Finite-difference time-domain method, Diffraction, Silver, Aluminum

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Proceedings Article | 18 September 2014 Paper

Effect of illumination parameters on the quality of wavefront diffracted by pinhole

Gongming Ding, Yuejing Qi, Zengxiong Lu, Guangyi Liu

Proceedings Volume 9282, 92821U (2014) https://doi.org/10.1117/12.2068292

KEYWORDS: Wavefronts, Spherical lenses, Monochromatic aberrations, Wavefront sensors, Calibration, Finite-difference time-domain method, Spatial filters, Diffraction, Wavefront aberrations, Collimators

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Showing 5 of 11 publications

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