Dr. Zhenxin Zhong Profile

Dr. Zhenxin Zhong

at Thermo Fisher Scientific Inc

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Automated TEM metrology and EDS characterization of plan view DRAM capacitors

Karthik Gnanasekaran, Michael Strauss, Jiashi Zhou, Lin Jiang, Xiaoting Gu, Zhenxin Zhong

Proceedings Volume 12955, 129553B (2024) https://doi.org/10.1117/12.3010955

KEYWORDS: Sensors, Capacitors, Transmission electron microscopy, Metrology, Electron beams, Aluminum, Distance measurement, X-rays, Solids, Photomicroscopy

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Proceedings Article | 27 April 2023 Poster + Paper

Automated (S)TEM metrology characterization of gate-all-around and 3D NAND devices

Michael Strauss, Chen Li, Chris Hakala, Xiaoting Gu, Antonio Mani, Zhenxin Zhong

Proceedings Volume 12496, 1249639 (2023) https://doi.org/10.1117/12.2658795

KEYWORDS: Metrology, Etching, Silicon, Nanosheets, Gallium arsenide, 3D metrology, Machine learning, Nitrogen, Process modeling, Automation

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Proceedings Article | 13 March 2018 Paper

Toward reliable and repeatable automated STEM-EDS metrology with high throughput

Zhenxin Zhong, Jason Donald, Gavin Dutrow, Justin Roller, Ozan Ugurlu, Martin Verheijen, Oleksii Bidiuk

Proceedings Volume 10585, 105852X (2018) https://doi.org/10.1117/12.2297403

KEYWORDS: Metrology, Signal to noise ratio, Scanning transmission electron microscopy, X-rays, Image processing, Electron beams, Logic

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