Portable Conformable Mask-A Hybrid Near-Ultraviolet And Deep-Ultraviolet Patterning Technique

B. J. Lin

doi:10.1117/12.957186

17 July 1979 Portable Conformable Mask-A Hybrid Near-Ultraviolet And Deep-Ultraviolet Patterning Technique

B. J. Lin

Proceedings Volume 0174, Developments in Semiconductor Microlithography IV; (1979) https://doi.org/10.1117/12.957186
Event: Developments in Semiconductor Microlithography IV, 1979, San Jose, United States

Abstract

Deep-UV conformable printing offers the capability of delineating submicrometer features with high aspect ratios. The profile of the resist image can easily be manipulated from overcut to vertical and undercut. However, making intimate contact between the mask and the wafer potentially induces defects. On the other hand, near-UV optical projection printing can be defect-free but cannot achieve a high aspect ratio in the photoresist image. In this paper a double layer resist system is used to combine the advantages of the two printing methods while eliminating the shortcomings. A thin AZ layer is spun on a thick PMMA layer. The AZ1350J layer is conventionally deliniated with a near-UV mask aligner. Because AZ1350J is opaque to deep-UV radiation, it acts as a built in conformable mask which can be carried with the wafer to a deep-UV blanket-exposure station to delineate the PMMA layer.

Citation Download Citation

B. J. Lin "Portable Conformable Mask-A Hybrid Near-Ultraviolet And Deep-Ultraviolet Patterning Technique", Proc. SPIE 0174, Developments in Semiconductor Microlithography IV, (17 July 1979); https://doi.org/10.1117/12.957186

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available