Precision Wafer Stepper Utilizing A Two-Dimensional Optical Encoder

Jim Dey

doi:10.1117/12.931870

28 July 1981 Precision Wafer Stepper Utilizing A Two-Dimensional Optical Encoder

Jim Dey

Proceedings Volume 0275, Semiconductor Microlithography VI; (1981) https://doi.org/10.1117/12.931870
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

This paper describes a two-dimensional optical encoder that is used to control the x-y stepping stage of a modern state-of-the-art wafer stepper. Stage location is determined by measuring the position of a quartz grid plate that is attached to the stage. Accuracy and resolution of measurement are maintained by varying the null position of the grid. Operational principles and actual performance are discussed.

Citation Download Citation

Jim Dey "Precision Wafer Stepper Utilizing A Two-Dimensional Optical Encoder", Proc. SPIE 0275, Semiconductor Microlithography VI, (28 July 1981); https://doi.org/10.1117/12.931870

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